Low CTE Ceramics
Low CTE Ceramics exhibit zero expansion at room temperature. These light weight ceramics are a good choice for applications like e-chucks and high-precision instruments where dimensional stability is critical.
Applications
- Semiconductor Process Equipment Parts
- Precision Machinery Parts
Properties
| General Properties | Main Component Purity (wt%) | 90 | |
| Color | Gray | ||
| Density (g/cm3) | 3.2 | ||
| Water Absorption (%) | 0 | ||
| Mechanical Properties | Bending Strength (MPa) | 880 | |
| Young's Modulus (GPa) | 290 | ||
| Vickers Hardness (GPa) | 12 | ||
| Thermal Properties | Max.Operating Temperature (°C) | 1300 | |
| Coefficient of Thermal Expansion (1/°C×10-6) | RT~500°C | 2.4 | |
| RT~800°C | 2.9 | ||
| Coefficient of Thermal Conductivity (W/m×K) | 27 | ||
| Thermal Shock Resistance ΔT (°C) | 800 | ||
| Electrical Properties | Volume Resistivity | 25°C | 1015 |
| 300°C | - | ||
| 500°C | - | ||
| 800°C | - | ||
| Dielectric Constant | 10GHz | 8 | |
| Dielectric Loss (×10-4) | 14 | ||
| Q Factor (×104) | 0.7 | ||
| Dielectric Breakdown Voltage (KV/mm) | 15 | ||